The software library allows for post-analysis data processing (background subtraction, smoothing, peak identification, linear least-squares fitting, target factor analysis, curve and peak analysis, and separation of multiple chemical states in maps, line scans, profiles). Software for surveys, high-resolution multiplexes, sputter depth profiles, line scans, chemical images, automated analyses, and user-defined settings are all available. High-performance sputter depth-profiling.X-ray-induced secondary electron imaging.High sensitivity large-area spectroscopy.High-performance micro-area spectroscopy.
In addition to the X-ray beam focusing and scanning ability, the VersaProbe provides the following techniques: The field of view can be as large as 1500 µm by 1500 mm. The spot size can be varied between less than 10 µm diameter (for highest spatial resolution) to 100 µm (for highest sensitivity). A major advantage of this design is that most of the photoelectrons generated by the focused X-ray beam are actually collected by the electron energy analyzer. The focused X-ray beam can be scanned across the specimen surface by correspondingly scanning the electron beam across the surface of the aluminum anode. A monochromator, consisting of an ellipsoid-shaped crystal, collects X-rays from the point source and focuses them on the surface of the specimen.
A point source of X-rays is created by focusing an electron beam onto an Al anode. In the Tools menu, the Chemical State ID feature can be used on a. If the C1s in some other chemical state such as CF4 from Teflon, the PkEnergy can be changed to that reference value (for example 292.2eV for Teflon) 9. from normalized XPS spectra while being based on the height of the peaks and. Drag the green cursor to the center of the C-C or C-H peak and the entire spectrum will shift so C1s284.8eV (FIG 10). A most important attribute of the VersaProbe is that it can produce a focused, highly monochromatic X-ray beam that can be scanned over the specimen surface. The identification of the chemical state of an element can be obtained. The PHI VersaProbe XPS Microprobe is a multi-technique surface analysis instrument based on PHI's highly developed scanning X-ray microprobe technology.
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